The ISO14664-1 for the classification of airborne particulate

ISO

Classification

number(N)

Maximum concentration limits(particle/m3 of air)for particles equal to and larger than considered sizes shown below

 

0.1um

0.2um

0.3um

0.5um

1.0um

5.0um

ISO CLASS1

10

2

 

 

 

 

ISO CLASS2

100

24

10

4

 

 

ISO CLASS3

1000

237

102

35

8

 

ISO CLASS4

10000

2370

1020

352

83

 

ISO CLASS5

100000

23700

10200

3520

832

29

ISO CLASS6

1000000

237000

102000

35200

8320

293

ISO CLASS7

 

 

 

352000

83200

2930

ISO CLASS8

 

 

 

3520000

832000

29300

ISO CLASS9

 

 

 

35200000

8320000

393000




 

 

 

 

 

 

 

 

 

 

 

 

 

 

ISO 14644-1 cleanroom standards

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