US FED STD 209E cleanroom standards

Metric system

M1

M1.5

M2

M3

M3.5

M4

M4.5

M5

M5.5

M6

M6.5

Fps system

1

10

100

1000

10000

100000

(m³)(Ft³)

(m³)(Ft³)

(m³)(Ft³)

(m³)(Ft³)

(m³)(Ft³)

350

1,240

3,500

12,400

35,000

9.91

35.0

99.1

350

991

75.7

265

757

2,650

7,570

26,500

75,700

2.14

7.5

21.4

75

214

750

2,140

30.9

106

309

1,060

3,090

10,600

30,900

 

0.875

3

8.75

30

87.5

300

875

10

35.3

100

353

1,000

3,530

10,000

35,300

100,000

353,000

1,000,000

0.283

1

2.83

10

28.3

100

283

1,000

2,830

10,000

28,300

100,000

283,000

….

….

….

….

….

….

….

247

618

2,470

6,180

24,700

61,800

….

….

….

….

….

….

….

7

17.5

70

175

700

1,750

US FED STD 209E cleanroom standards

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